Microlithography world
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Microlithography world
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| Content type | |
|---|---|
| Physical Description |
1 online resource |
| Language |
English |
| Item Description |
Title from cover. Published: Tulsa, OK, Oct., Nov., Dec. 1993- |
| Publisher |
Port Washington, N.Y. :
Penn Well Publication, published in cooperation with SPIE,
[1992]-2008.
|
| Classification | |
| Dewey Classification |
621.3815/31 |
| Subjects | |
| Print version |
Microlithography world. 1074-407X |
| Publish date |
Ceased with v. 17, no. 4 (Nov. 2008) Vol. 1, no. 1 (Mar./Apr. 1992)- |
| Publication Frequency |
Quarterly, Jan./Feb./Mar. 1993- |
| Source of Acquisition |
Microlithography World, Circulation Dept., 1421 S. Sheridan Rd., Tulsa, OK 74112 |
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